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Low-Profile Rotary Table
Jul 2011
PI (Physik Instrumente) LP, Air Bearings and Piezo Precision MotionRequest Info
AUBURN, Mass., July 12, 2011 — PI (Physik Instrumente) L.P. has released a higher-precision version of its M-660 low-profile rotary table.

Driven by piezo motors that enable a profile of 14 mm, the new model is equipped with a high-accuracy direct measuring encoder and provides eight times the position resolution of the existing version.

The M-660 rotary table can accelerate to velocities of 720°/s, with an unlimited travel range, and its directly coupled precision optical encoder resolves positions down to 4 µrad (0.00023°), providing phase-lag-free, backlash-free feedback to the servo controller. Its self-clamping ceramic drive provides high stability, with no energy consumption at rest and no heat generation.

Applications include semiconductor/test equipment, metrology and optical instrumentation.

The PILine motor principle is nonmagnetic and vacuum-compatible.

Mass and inertia are reduced significantly compared with conventional rotation stages because of the lightweight direct-drive ceramic motor, operating without gears or magnets. The net result is fast start/stop behavior, and precise bidirectional speed and position control, which are critical for high-speed motion contouring.

A motion controller for piezo motors is available to take advantage of the specific motion characteristics of ultrasonic ceramic motors. USB interfacing and a solid software and driver package (LabView, Matlab) for seamless integration are included.


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Americasbacklash-freeceramic motordirect measuring encoderhigher-precision versionLabViewM-660MassachusettsMatLabmetrologynonmagneticoptical encoderoptical instrumentationphase-lag-freePI (Physik Instrumente)piezo motorsPILine motor principleProductsrotary tableself-clamping ceramic drivesemiconductorSoftwareTest & Measurementtest equipmentunlimited travelUSBvacuum compatible

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