MEMS-FPI Sensors Detect NIR Spectra
Hamamatsu CorporationRequest Info
Hamamatsu’s MEMS-FPI spectrum sensors (C13272 series) are a more compact and less expensive option for measuring NIR spectra than a multichannel detector and associated optics. These sensors consist of an InGaAs PIN photodiode and a miniature Fabry-Perot interferometer (FPI) that scans through a range of NIR wavelengths from 1550 nm to 1850 nm. The FPI is fabricated using MEMS (micro-electro-mechanical systems) technology, making the interferometer compact enough to fit into a TO-5 metal can package. The package is also hermetically sealed, so the sensor is resistant against humidity. The MEMS-FPI sensor’s small size is conducive to handheld or portable instrumentation.
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