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MEMS Inclinometers

Sherborne Sensors Ltd.Request Info
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The T700 series compact DC-operated solid-state microelectromechanical systems (MEMS) inclinometers has been launched by Sherborne Sensors to measure inclination proportional to sine of angle in one axis (model T710) or dual axes at right angles (model T720). Available in ranges from ±30° to ±90°, the devices feature a micromachined MEMS sensor with air damping. The units are packaged in a lightweight aluminum housing with an integral shielded cable connection, and they include positive mechanical stops for good shock resistance and reliable overranging protection. The characteristic error correction equation helps minimize uncertainties caused by zero offset, sensitivity error and linearity, and thermal zero and sensitivity shift. Measurement accuracy is better than ±1 mrad.

Photonics Spectra
Jan 2010

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air dampingaluminum housingDC-operateddual axeserror correction equationMEMS inclinometersNew Productsone axisSensors & DetectorsSherborne Sensorssolid-stateT700Test & Measurement

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