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MH-910W Work Cell

Nordson AsymtekRequest Info
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CARLSBAD, Calif., Aug. 5, 2011 — Nordson Asymtek has introduced an automated work cell for film-frame wafer-level packaging applications. It is intended for customers who want to buy their dispensing and handling equipment from a single vendor and are looking for a lower cost of ownership than is offered by traditional wafer handling solutions.

The MH-910W integrates wafer dispensing and handling in one automated work cell to minimize footprint and maximize throughput.

The work cell same-side loader/unloader integrated with the Spectrum S-920N dispenser is designed for 150-mm film-frame wafer processing and is flexible enough to support various sizes. Applications include microelectromechanical systems/image sensor capping, wafer coating for imaging devices such as digital light processing, life sciences for biochip reagent jet dispensing, and jetting of thin coatings prior to laser dicing to reduce the contamination or dust caused by ablation fallout from the dicing process.

Advanced process controls are built in to ensure smooth, error-free transport and dispensing. Both the MH-910W film-frame loader/unloader and the S-920N dispensing system are fully enclosed with interlocked doors and windows for operator safety and part security. Access panels are easily removed, and built-in software maintenance tools facilitate servicing.

The work cell provides the programmable transport speed to maximize units per hour, while multiple sensors and active pinch wheels ensure safe handling. Film-frame wafers are pulled from one cassette and returned to a second one after the dispense. A frame sensor identifies the next available wafer, reducing search time for partially filled cassettes. During loading, film-frame wafers are carefully pulled from the cassette and through the system by a soft-touch gripper and active pinch wheels. Sensors also ensure that cassette slots are empty before processed wafers are returned to the second cassette.

The work cell measures ~1225 × 1321 mm and meets SEMI-S2, SEMI-S8, SMEMA, and CE standards and certifications.
Aug 2011

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Americasbiochip reagent jet dispensingBiophotonicsCaliforniaCE-compliantcoatingsdefensefilm-frame wafer-level packagingimage sensor cappingjetting of thin coatingsmeets SEMI-S2meets SEMI-S8meets SMEMAMEMS cappingMH-910W automated work cellmicroelectromechanical systems cappingNordson AsymtekPhotonic Component Mfg. Equip.Photonics Component Mfg. Equip.Productssame-side loader/unloaderSensors & DetectorsSpectrum S-920N dispenserwafer coating for imaging deviceswafer dispensing and handling

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