MULTIAXIS STAGES WITH SUBNANOMETER RESOLUTION
PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsRequest Info
Physik Instrumente GmbH & Co. has developed the P-517.2C and P-527.2C X-Y piezoelectrically driven flexure stages. They feature 100 3 100- and 200 3 200-µm X-Y travel ranges, integrated capacitive displacement sensors, subnanometer resolution and a 66 3 66-mm clear aperture. The positioners are equipped with low-voltage piezoelectric drives integrated into a flexure guiding system, which eliminates friction and improves guiding precision. With a 10- to 20-ms settling time, they are suited for fast scanning operations including semiconductor inspection systems, CD measurement and microlithography.
https://www.pi-usa.us/en
/Buyers_Guide/PI_Physik_Instrumente_LP_Motion_Control_Air/c11819
Published: August 1997
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