Mask Aligner
SUSS MicroTec SERequest Info
The MA12 Gen3 300-mm mask aligner from SÜSS MicroTec SE combines photo lithography, microimprinting, nanoimprinting, and wafer level stacking within a compact tool.
As a semi-automated mask aligner, the device opens up a variety of imprint applications, from R&D, pilot, and high-volume manufacturing. Its imprint processing capabilities for standard, advanced, and high-end processes enable technologies like face or fingerprint recognition, light carpets, or augmented reality. The leveling system and gap measurement technology enable improvements in resolution compared to conventional methods.
http://www.suss.com
https://www.photonics.com/Buyers_Guide/SUSS_MicroTec_SE/c14391
Photonics Spectra
Feb 2023
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