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Mask Aligner

SUSS MicroTec SERequest Info
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The MA12 Gen3 300-mm mask aligner from SÜSS MicroTec SE combines photo lithography, microimprinting, nanoimprinting, and wafer level stacking within a compact tool.

As a semi-automated mask aligner, the device opens up a variety of imprint applications, from R&D, pilot, and high-volume manufacturing. Its imprint processing capabilities for standard, advanced, and high-end processes enable technologies like face or fingerprint recognition, light carpets, or augmented reality. The leveling system and gap measurement technology enable improvements in resolution compared to conventional methods.

Photonics Spectra
Feb 2023
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ProductsMA12mask alignerSüss MicroTecnanoopticsWafersmachine visionTest & MeasurementEurope

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