Mask Aligner

SUSS MicroTec SERequest Info
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The MA12 Gen3 300-mm mask aligner from SÜSS MicroTec SE combines photo lithography, microimprinting, nanoimprinting, and wafer level stacking within a compact tool.

As a semi-automated mask aligner, the device opens up a variety of imprint applications, from R&D, pilot, and high-volume manufacturing. Its imprint processing capabilities for standard, advanced, and high-end processes enable technologies like face or fingerprint recognition, light carpets, or augmented reality. The leveling system and gap measurement technology enable improvements in resolution compared to conventional methods.

Published: December 2022
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ProductsMA12mask alignerSüss MicroTecnanoOpticsWafersmachine visionTest & MeasurementEurope

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