Mechatronic Calotte Loader

mechatronic systemtechnik GmbHRequest Info
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VILLACH, Austria, Feb. 11, 2021 — Mechatronic Calotte LoaderThe mWL.cs mechatronic calotte loader from mechatronic systemtechnik GmbH is an automated, standalone system for transferring wafers between cassettes and calottes.

The mWL.cs provides integrated device manufacturers with an opportunity to increase yield and improve process traceability at a high throughput. It provides hand-off position measurement and auto-teaching capabilities of <50 µm, along with host notification of wafer ID, cassette ID, segment ID, and position in the segment for improved process traceability. Two loading areas allow for continuous processing.

Published: February 2021
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ProductsmWL.csmechatronic calotte loadermechatronic systemtechniksemiconductorsWafersOpticsEurope

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