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Metrology Suite

Nova Ltd.
 
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REHOVOT, Israel, Mar. 7, 2022 — A metrology suite from Nova Ltd. addresses the manufacturing challenges of next-generation logic devices.

The Nova PRISM enables superior metrology performance in critical applications, enabled by the platform's spectral interferometry technology. The Nova i570 integrated metrology platform improves total inline measurement capabilities in small structures and multiple layers for high-volume manufacturing. Nova METRION® enables depth profiles of materials composition in nanosheet manufacturing material deposition. Nova ELIPSON utilizes advanced Raman spectroscopy technology for optical materials metrology to extract materials properties of in-die structures. Nova VERAFLEX® IV delivers direct measurement control over mono-layer film stacks and dopant concentrations by generating x-ray flux and a proprietary optical system necessary to address complex structures.



Published: March 2022
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