Microelectromechanical Systems
Materion Balzers OpticsRequest Info
Materion Balzers Optics has
coating techniques for MEMS
wafers, depositing a wide
range of UV, optical, and visible
coatings patterned by photolithography.
Our 200-mm wafer
fabrication can provide many
of the operations required for
fabrication on glass or silicon.
Materion is one of the few fabs
that can perform lithography on wafers with topography features
etched at 0.2 mm deep.
https://materion.com/balzersoptics
/Buyers_Guide/Materion_Balzers_Optics/c1511
Published: November 2021
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