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Mobile Leak Detector

INFICONRequest Info
 
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EAST SYRACUSE, N.Y., Sept. 20, 2021 — Mobile Leak DetectorThe UL6000 Fab Mobile Leak Detector from INFICON Inc. is designed for large-volume production lines in the semiconductor industry.

The UL6000 Fab’s booster turbomolecular pump moves helium with more than 36 l/s, making it quick to respond with short signal rise and decline times. A high-performance roots pump with an air pumping capacity of 36 m³/hour acts as a roughing pump for bulk evacuation. The UL6000 Fab can detect tiny leaks down to 5·10-12 mbar·l/s.

The portable device can be used for the production of semiconductor chips, solar cells, flat panel displays, glass and plastic foil coating, and vacuum systems. It uses the vacuum method with helium as the tracer gas.

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Sep 2021
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