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Motion Platform

Industrial Photonics
Apr 2016
Griffin Motion LLCRequest Info
The customizable CXY-BS series 150-mm XY motion platform from Griffin Motion LLC delivers high precision, accuracy and repeatability for applications including microscopy, inspection, wafer processing, microtiter plate processing, laser marking and optical positioning.

Compact and low profile, the stage exhibits 10-arcsec orthogonality and high parallelism, enabling 10-μm linear accuracy and 1-μm linear repeatability. Capable of operating in any orientation, the platform can also attain high linear velocities up to 150 mm/s, which is useful for factory automation and semiconductor processing equipment.

An integrated brushless servo motor is directly coupled to zero-backlash ball screws, providing smooth operation and velocity control.


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