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NanoImprint Lithography (NIL) Foundry

Moxtek Inc.Request Info
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NanoImprint Lithography (NIL) FoundryMoxtek offers state-of-the-art NIL volume manufacturing on 8-inch glass and silicon wafers. Based on data from 10,000 processed wafers, we have shown stamp life well in to the 500 to 750 print ranges with some lifetime test up to 1300 prints, and minimally maintained critical dimension (CD) of 30 nm. The foundry service includes master design and manufacturing, stamp making, imprint prototyping, and mass production.

We provide DOE and cycles of leaning for print optimization along with statistical process control (SPC) monitoring of post print CD repeatability. This foundry service offers versatile capabilities for manufacturing of functional micro- and nano- nanostructures such as waveguides, diffractive optics (DOE), microlens arrays, photonics crystal, and other metasurfaces for display, imaging, AR/MR, medical, automobile, and many other applications.


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opticsProductsNILsilicon waferslithographynanoimprintstatistical process controlwaveguidesdiffractive opticsmicrolens arraysDisplaysimagingAR/MRphotonics crystalsmetasurfaces

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