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Nanometer-Precision Motion Control

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MICROMO Piezo MotorsCompact, high quality Piezo LEGS® Motors deliver reliable, high precision performance for challenging applications. Unlike conventional electric motors, Piezo LEGS® Motors operate directly, without the need for gears or mechanical transmission, to create backlash-free linear motion with single-digit nanometer or sub-nanometer resolution.

Piezo LEGS® are ideal for applications in markets such as optics, photonics, aerospace, lasers, medical devices, semiconductor equipment, and factory automation.

The small Piezo LEGS® motors feature predictable sub-micron, direct drive motion, and they can be combined with any driver. There are vacuum and non-magnetic versions available as well.

MICROMO offers piezo motor technologies from PiezoMotor as part of MICROMO’s motion solution offerings to the North American market. Please contact the MICROMO team at 800-807-9166 or visit for more information.


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