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Nanopositioners

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PITTSBURGH, Dec. 22, 2015 — NanopositionersNdrive QLe nanopositioning piezo drives from Aerotech Inc. are designed for use with the Automation 3200 motion controller in semiconductor, data storage, medical device manufacturing, laser processing and metrology applications.

The drives enable coordinated motion between piezo stages and servo axes at high rates. The digital, panel-mount devices feature a dual-core 456-MHz double-precision floating-point digital signal processor. Applications include point-to-point motion, linear and circular interpolation, multiaxis error correction, and autofocusing. High-speed interrupts and data logging provide a real-time link to external systems.

High-speed position latching and single- or multiaxis position synchronized outputs generate pulses based on actual position feedback for applications ranging from laser firing to data acquisition system triggering. The drives enable subnanometer positioning resolution at high bandwidths. Capacitive sensor feedback circuitry provides ultralow noise performance over the full travel range. A proprietary capacitive sensor feedback circuit offers thermal stability and long-term holding stability. Linearity is better than 0.01 percent over the full travel range in closed-loop mode.



Published: December 2015
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