Nanopositioning Stage

PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsRequest Info
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Nanopositioning StageThe A-142 high-performance, compact nanopositioning and linear alignment stage from Physik Instrumente LP is designed with a voice coil motor and frictionless air bearing slide for repeatable motion and accuracy.

The only 27-mm high device is maintenance free and cleanroom compatible due to its nonparticle generating drive and guiding principle. It delivers 10 mm of hysteresis-free linear travel of its 75 × 80-mm moving platform while supporting up to 3-kg loads. The air bearing guide guarantees straightness of 100 nm and flatness of 0.5 µm. The integrated voice-coil motor achieves a maximum velocity of 450 mm/s and acceleration of 20 m/s2.

Applications include industrial automation processes in fields such as semiconductor testing and metrology, genome sequencing, bio-tech, medical engineering, high-resolution microscopy, optics, and photonics manufacturing.

Published: May 2021
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ProductsA-142nanopositioning stagePhysik InstrumentePInanopositioningOpticsindustrialBiophotonicsmedicalmedicineMicroscopyAmericas

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