Nanopositioning Stages

PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsRequest Info
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PIHeraSuitable for applications that require frictionless, vibration-free positioning with high linearity, new nanopositioning stages from PI (Physik Instrumente) LP offer travel ranges of 50 to 250 μm and positioning accuracy of 0.02 percent.

PIHera Z flexure-guided piezo nanopositioning stages provide vibration-free motion with virtually unlimited resolution and a fast response. A lack of rolling elements ensures no bearing rumble for uniformity and straightness of motion.

The closed-loop Z stages are equipped with absolute-measuring direct-metrology capacitance sensors, providing a resolution down to 0.1 nm in a compact, finite-element-analysis-optimized package for high stiffness and a long lifetime.

Published: August 2015
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