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Nanopositioning System

PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsRequest Info
 
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AUBURN, Mass., May 2, 2019 — Nanopositioning SystemThe P-616 NanoCube nanopositioning system from Physik Instrumente LP enables fast active alignment and higher scanning speed with integrated sensors for nm-precise closed-loop control.

Based on a parallel-kinematic design, with only one lightweight moving platform for all three axes, the P-616 is available with high precision and dynamics in a compact package, delivering a 100-µm travel range in 3° of freedom. The E-727 digital servo piezo controller offers the advantage of higher linearity, faster settling and scanning speed, and easy access to all motion parameters compared to conventional analog piezo controllers.

Applications include photonics alignment, microscopy, 3D imaging, screening, surface analysis, and wafer inspection.



Published: May 2019
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ProductsP-616NanoCubenanopositioning systemnanopositioningWafersMicroscopyImagingAmericasPI (Physik Instrumente)

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