Nanopositioning stage
PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsRequest Info
PI (Physik Instrumente) LP has unveiled the M-511.HD hybrid nanopositioning translation stage, which can be used in nanometrology, microscopy, laser technology and interferometry. The hybrid system combines the advantages of piezo-flexure drives with the long travel ranges (to 100 mm) and high holding forces of a servomotor/ballscrew arrangement. The stage features 4-nm linear encoder resolution, reliable execution of nanometer-level increments, millisecond settling time to nanometer accuracy, and active compensation of stick/slip during startup and settling. It also offers active backlash compensation, velocity control, a 100-kg load capacity and high holding forces with minimum power consumption.
https://www.pi-usa.us/en
/Buyers_Guide/PI_Physik_Instrumente_LP_Motion_Control_Air/c11819
Published: April 2007
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