Search Menu
Photonics Media Photonics Buyers' Guide Photonics Spectra BioPhotonics EuroPhotonics Vision Spectra Photonics Showcase Photonics ProdSpec Photonics Handbook

Nanoresolution Parallel and Serial Kinematic Robotic Stages

ALIO Industries Inc.Request Info
Facebook Twitter LinkedIn Email Comments
ALIO's 3-axis tripod and 6-axis hexapod robotic systems promise to revolutionize the manufacturing processes of products requiring nanometer resolution and repeatability. The parallel kinematic stages offer an impressive 10-nanometer resolution with the ability to revolve around a virtual point in space, coupled with speeds of up to 200 mm/sec. ALIO's broad line of linear and rotary stages can be configured into various serial kinematic structures. These precision stages can be modified or reengineered to meet specific customer needs. ALIO's robotic products form the basis of the next generation of automated nanopositioning systems for the most demanding applications in photonics, packaging, test, measurement, MEMS, medical and semiconductor manufacturing. All products are available for atmospheric, cleanroom and vacuum environments. The ALIO Advantage: All stages use patented ceramic servomotors and high-resolution linear optical encoders. Our drive technology offers speeds from 1 micron/sec up to 250mm/sec, incremental step down to 5nm, ~1ms settling time, high stage resonance frequency and no servo dither and no hysteresis. These are notable advantages over traditional linear and rotary DC servomotors when working with photonic alignments or nano-resolution inspection applications.
Jul 2005

* Message:
(requirements, questions for supplier)
Your contact information
* First Name:
* Last Name:
* Email Address:
* Company:
Address 2:
Postal Code:
* Country:
Phone #:
Fax #:

Register or login to auto-populate this form:
Login Register
* Required

When you click "Send Request", we will record and send your personal contact information to ALIO Industries Inc. by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our Privacy Policy and Terms and Conditions of Use.
ALIOindustrialIndustry EventsphotonicsProductsrobotic systemsstages

back to top
Facebook Twitter Instagram LinkedIn YouTube RSS
©2020 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA, [email protected]

Photonics Media, Laurin Publishing
x We deliver – right to your inbox. Subscribe FREE to our newsletters.
Are you interested in this product?
When you click "Send Request", we will send the contact details you supply to ALIO Industries Inc. so they may respond to your inquiry directly.

Email Address:
Stop showing me this for the remainder of my visit
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.