Nanoresolution Parallel and Serial Kinematic Robotic Stages

ALIO Industries LLC

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ALIO's 3-axis tripod and 6-axis hexapod robotic systems promise to revolutionize the manufacturing processes of products requiring nanometer resolution and repeatability. The parallel kinematic stages offer an impressive 10-nanometer resolution with the ability to revolve around a virtual point in space, coupled with speeds of up to 200 mm/sec. ALIO's broad line of linear and rotary stages can be configured into various serial kinematic structures. These precision stages can be modified or reengineered to meet specific customer needs. ALIO's robotic products form the basis of the next generation of automated nanopositioning systems for the most demanding applications in photonics, packaging, test, measurement, MEMS, medical and semiconductor manufacturing. All products are available for atmospheric, cleanroom and vacuum environments. The ALIO Advantage: All stages use patented ceramic servomotors and high-resolution linear optical encoders. Our drive technology offers speeds from 1 micron/sec up to 250mm/sec, incremental step down to 5nm, ~1ms settling time, high stage resonance frequency and no servo dither and no hysteresis. These are notable advantages over traditional linear and rotary DC servomotors when working with photonic alignments or nano-resolution inspection applications.

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Published: July 2005