Nanoscale IR Spectroscopy System

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SEOUL, South Korea, Jan. 23, 2023 — Nanoscale IR Spectroscopy SystemThe Park NX-IR R300 nanoscale IR spectroscopy system from Park Systems Corp. joins with atomic force microscopy for up to 300-mm semiconductor wafers.

It provides chemical property information as well as mechanical and topographical data for semiconductor research, failure analysis, and defect characterization at high nano resolution. Photo-induced force microscopy spectroscopy provides chemical identification at <10-nm spatial resolution. It uses a noncontact technique for damage-free spectroscopy probing, high resolution, and accuracy throughout scans. Users obtain spectroscopy information at varying depths for insight into sample composition.

Published: January 2023
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ProductsPark NX-IR R300nanoscale IR spectroscopy systemnanospectroscopyPark SystemswaferMicroscopyAsia-Pacific

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