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Ohara Corp. - Optical Glass, Polish substrates 2024 LB

OCD Metrology Platform

Onto InnovationRequest Info

OCD Metrology Platform. Courtesy of Onto Innovation.

The Atlas G6 optical critical dimension (OCD) metrology system from Onto Innovation is designed for process control in advanced semiconductor nodes. The Atlas G6 system features accuracy and the small spot size needed to support precision in controlling individual nanowire measurements in GAA and smaller DRAM cell block sizes for high bandwidth memory. The system introduces an additional data channel, which, when combined with Onto’s proprietary AI Diffract OCD analysis software and model-guided machine learning algorithms, strengthens and shortens time to solution.

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About this supplier

Published: September 2025

There are 96 suppliers of Quality Control and Inspection Systems in the Photonics Marketplace.

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