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Mar 2014
Opto Diode CorporationRequest Info
NEWBURY PARK, Calif., Feb. 28, 2014 — Opto Diode Corp. has released the ODD-SXUV-DLPSD duolateral UV/EUV (extreme-UV) submicron position resolution sensor for positioning and advanced lithography applications.

The device provides a stable response after exposure to UV and/or EUV radiation. Featuring a 5 × 5-mm active area, the position-sensing photodiode operates from 1- to 400-nm wavelengths.

Responsivity at 13 nm is typically 0.2 A/W; at 354 nm, responsivity is typically 0.02 A/W. Dark current under operating conditions is 10 nA, typical, and 50 nA, maximum. The device offers reverse breakdown voltage of a minimum of 50 V and a capacitance of 40 (typical) to 60 (maximum) pF.

Operating and storage temperatures range from –10 to 40 °C, ambient, and from –20 to 80 °C in nitrogen or vacuum conditions. The maximum junction temperature is 70 °C, and the lead-soldering temperature is 260 °C at 0.08 in. from the case for 10 s.


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AmericasCaliforniaindustriallithographyOpto DiodephotodiodepositioningProductsSensors & DetectorsUV radiationODD-SXUV-DLPSD position sensorextreme UV radiationEUV radiation

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