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Optical Metrology Z-Axis Stage

Nutec Components Inc.Request Info
 
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Optical Metrology Z-Axis StageThis Q-Max series features technology to position optics in a vertical orientation and maintain high stability. The payload capacity is up to 25 kg with travel ranges from 25 to 100 mm. It is cleanroom compatible. Positioning performance and reliability are supported by the linear encoder with an accuracy of 2 µm F.T. with error correction option to 250 nm. Standard resolution is 50 nm with 1 nm optional. The stage is driven by a 1-mm lead ballscrew and a 60 × 60-mm brushless servomotor. The fine-pitch screw drive does not backdrive, which avoids using a brake motor. Options include mechanical and electrical interfaces, travel range and signal choices.



Published: July 2014
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