Optical Surface Profiler
Bruker AXS Inc.Request Info
Bruker Corp. has announced the AcuityXR optical surface profiler
technology that combines proprietary and patent-pending hardware and software to
enable select ContourGT noncontact 3-D optical surface profilers to break the optical
diffraction limit and deliver high lateral resolutions. The company’s optical
surface profiler systems equipped with AcuityXR have shown resolution of features
below 130 nm in width, which the company says is nearly three times finer than that
of systems without this technology. AcuityXR enables this new level of precision
while preserving the wide field of view and high-performance benefits of noncontact
3-D optical surface profiling. This optional capability is now available on the
company’s ContourGT-K1, X3 and X8 optical surface profilers. Applications
include semiconductor, medical and precision machining.
https://www.photonics.com/Buyers_Guide/Bruker_AXS_Inc/c2046
Photonics Spectra
Feb 2011