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Optical Surface Profiler

Bruker AXS Inc.Request Info
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Bruker Corp. has announced the AcuityXR optical surface profiler technology that combines proprietary and patent-pending hardware and software to enable select ContourGT noncontact 3-D optical surface profilers to break the optical diffraction limit and deliver high lateral resolutions. The company’s optical surface profiler systems equipped with AcuityXR have shown resolution of features below 130 nm in width, which the company says is nearly three times finer than that of systems without this technology. AcuityXR enables this new level of precision while preserving the wide field of view and high-performance benefits of noncontact 3-D optical surface profiling. This optional capability is now available on the company’s ContourGT-K1, X3 and X8 optical surface profilers. Applications include semiconductor, medical and precision machining.

Photonics Spectra
Feb 2011

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AcuityXR optical surface profiler technologyBruker Corp.ContourGT noncontact 3-D optical surface profilershigh lateral resolutionsNew Productsoptical diffraction limitopticspatent-pending hardware and softwareproprietary

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