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Optical Wafer Test Station

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Optical Wafer Test StationThe LumiTop 4000 μLED optical wafer test station from Instrument Systems GmbH generates 2D, pixel-resolved optical analyses within given cycle times.

The LumiTop 4000 has a resolution of 12 MP and can detect the smallest of defects and inhomogeneities on the wafer. Its 100-mm macro lens enables fast parallel inline analysis of all μLEDs on a wafer at a single test station. The 2D camera is combined with a high-end spectroradiometer that serves as a simultaneous reference measuring instrument for accurate readings. The LumiTop series includes a special version for test objects of all sizes.

With a field of view of 1 × 1.4 cm, it can measure many thousands of μLEDs in parallel with a minimum pixel size as low as 30 μm. A hardware trigger synchronizes the camera with the given cycle time. The CMOS sensor offers a particularly broad dynamic range.


Published: August 2020
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ProductsOptical Wafer Test StationLumiTop 4000waferInstrument SystemsOpticsTest & MeasurementEurope

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