PLu Apex Optical Profiler

Sensofar Metrology

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Providing noncontact metrology for commercial and high-end optical surfaces, the PLu apex from Sensofar-Tech SL is a compact 2-D optical profiling system for commercial and high-end optics and designed for measuring any optical surface, including aspheric and free-form optics.

It is based on proprietary core confocal profilometry technology that uses the company’s Confocal Tracking algorithm, which employs structured illumination and a high-numerical-aperture microscope objective to automatically and precisely determine the position of the sample surface.

Using a high-resolution air-bearing stage to track horizontal movement of the objective and collating this with the vertical position of the sensor head needed to keep the surface in focus, the system reconstructs the surface profile with accuracy and reproducibility. Horizontal resolution is 1 nm, and vertical resolution is 0.5 nm.

Features include measurement objectives spanning 10× to 100×, quick and easy alignment of the sample, fast measurement (1 mm/s, typical) and the ability to measure up to 65° slope angles. The measurement ranges cover 0.1 to 100 mm in the horizontal (500 mm optional) and up to 50 mm on the vertical axis.

SensoTrack software provides a user-friendly interface, simplifying sample measurement, and a basic set of tools for displaying and analyzing data. It also assists the user when aligning the sample for measurement. An aspheric analysis module provides form assessment with respect to a design or a reference form.

The device is suitable for characterizing high-volume mass production optics for commercial applications including Blu-ray and DVD, mobile telephones, digital cameras and projector lenses, and also is well suited for the high-precision lens and free-form optics designs used in astronomical instrumentation, optical data storage and photolithography.

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Published: January 2011