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With an 800-μm motion range in a low-profile design, the nanoSX 800, a piezo actuator from piezosystem jena GmbH, features the proprietary nanoX gear and guidance design. It includes two piezo actuators that provide active actuation forward and backward. The instrument’s bidirectional characteristics enable good dynamics, transient response, loading capacity and guidance accuracy. A 12.5-mm free inner aperture accommodates feed-through of components, and 2.5-N Z-axis stiffness provides load capacity into the kilogram range. Users may integrate measurement systems for repeatable drift-free positioning in the subnanometer range.

Photonics Spectra
Dec 2007

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nanoNew Productspiezo actuatorspiezosystem jena GmbHpositioningsubnanometer range

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