PX 100 CAP Piezoelectric Nanopositioning Stage
piezosystem jena GmbHRequest Info
Piezosystem jena has redesigned its PX 100 CAP piezoelectric nanopositioning stage.
The travel range has been extended to 100 μm of motion in closed-loop mode without compromising the stage’s accuracy. For positioning control, a high-resolution capacitive feedback sensor has been built in.
The sensor measures a deviation of the accuracy with subnanometer accuracy and operates in a direct metrology fashion.
Another benefit of the redesign is the height, which has been reduced by 9 mm, so the stage now has outside dimensions of only 40 × 40 × 20 mm. It is appropriate for high-precision positioning of small components, such as mirrors or other optical components. Its high accuracy provides long-term stability under changing conditions.
https://www.piezosystem.com
/Buyers_Guide/piezosystem_jena_GmbH/c11842
Published: May 2012
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