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Particle Measuring Systems

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Particle Measuring SystemsThe NanoAir10 from Particle Measuring Systems is a 10-nm condensation particle counter that enables detection of yield impacting particle excursions at their source for continuous monitoring inside process tools, pressurized high-purity gas delivery, and ultra-cleanroom areas.

The system can detect the location of particles within process tools and equipment front-end modules. An innovative working fluid handling system provides continuous operation without the need for user intervention between annual maintenance. The device can be used with the ParticleSeeker manifold for custom programmed sampling broadly covering 120 m2 of the fabrication/process area. It measures high-pressure gas lines for continuous monitoring of inert gases.



Published: May 2023
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ProductsNanoAir 10Particle Measuring Systemscondensation particle counterSensors & DetectorsindustrialAmericas

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