Patterned Thin-Film Coatings

Deposition Sciences Inc. (DSI)

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The drive towards smaller photonic sensors, often integrated on monolithic substrates with other processing electronics, has created a need for coatings directly on semiconductor wafers, or on miniaturized substrates. Specifically, this allows the integration of optical filters, apertures or other features which modify light transmission directly on to a device. Applications include multispectral sensing and imaging, colorimetry and remote sensing.

DSI utilizes photolithography, together with either our proprietary MicroDyn^® sputtering technology or traditional evaporative coating methods, to produce a wide array of precision patterned thin-film coatings, such as antireflection coatings, bandpass filters, dark mirrors, and metals. We can create complex patterns of filter arrays, fiducial marks and apertures to match sensor arrays or other active devices - with feature sizes as small as 5 µm, on substrates up to 8 inches diameter. This precision patterning can be performed directly at the wafer level (before singulation), or on individual parts.

DSI has extensive experience and capabilities in photolithography. This allows us to consistently achieve high placement accuracy, and gives us the ability to accurately maintain coating spectral properties at the smallest geometries, to produce two sided coating capabilities (for windows), and to carefully control internal coating stress to maximize durability and lifetime. DSI utilizes both positive and negative resist processes for maximum flexibility and optimum results for each application.

All DSI patterned thin-film coatings are custom designed to meet specific customer needs. We invite you to work with our engineers to produce a patterned thin-film coating solution that provides the optimal combination of performance, delivery, and cost for your application. We particularly specialize in supporting customers in the development of coatings for unusual or challenging geometries. Please download our datasheet to learn more, or contact one of our Sales Engineers for a quotation

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