Photoacoustic Spectroscopy
CEA-Leti
GRENOBLE, France, March 23, 2020 —
CEA-Leti has developed a photoacoustic spectroscopy technology for the monitoring of dangerous chemical emissions and traces of gas.
The technology could reduce the cost and the size of these systems by a factor of 10 or more compared to existing tools. The system includes a fully integrated microelectromechanical system microphone dedicated to photoacoustic gas detection. It can be easily integrated into the fabrication process.
http://www.cea.fr/english
https://www.photonics.com/Buyers_Guide/CEA-Leti/c24495
Photonics.com
Mar 2020