Piezo Linear Stages and Drivers

MKS Instruments Inc.Request Info
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ANDOVER, Mass., June 19, 2019 — Piezo Linear Stages and DriversThe Newport Super Agilis Open Loop Piezo Motor-Driven Linear Stages and Drivers from MKS Instruments Inc. are compact, low-cost devices available in three sizes.

Capable of speeds >10 mm/s and a minimal incremental motion of 100 nm, the Super Agilis stages combine speed and sensitivity. All stages feature a width of 25 mm, a height of 12 mm, and are available in travel ranges of 16, 32 or 48 mm. The rigid stainless-steel construction with crossed roller bearings provides high reliability.

Ideal for high-precision linear positioning applications in research laboratories, microscopy, and semiconductor manufacturing, the device's all-in-one design with integrated CONEX controller and mechanics are compact with simple setup and easy to stack for XY positioning. The piezo stages can also be used vertically with a lifting force of >2 N.

Published: June 2019
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