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Piezo Motor

EuroPhotonics
Apr 2010
PI (Physik Instrumente) LP, Air Bearings and Piezo Precision MotionRequest Info
 
The N-216 Nexline high-load piezo linear motor from PI (Physik Instrumente) LP is an ultraprecision nanopositioning actuator that provides travel ranges to 20 mm and push/pull forces to 600 N. Based on coordinated motion of a number of highly preloaded linear and shear piezo elements acting on a ceramic runner, the motor is available in two versions for open- or closed-loop operation, as well as in two different load configurations. Used with the company’s PiezoWalk drive, it is suitable for high-end applications, including ultraprecision manufacturing, semiconductor test equipment, astronomy and high-energy physics. It can be used also for instrument internals that are difficult to access, where nanometer-realm adjustment and/or vibration cancellation is required.


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actuatorastronomyBasic Scienceceramic runnerclosed-loopEuropehigh loadhigh-energy physicsindustriallinearload configurationmotionmotorN-216 NexlinenanometerNanopositioningopen-loopPhysik InstrumentePIpiezopiezo linear motorPiezoWalkpreloadedProduct Previewsemiconductor test equipmentshear piezoTest & Measurementtravel rangeultraprecisionultraprecision manufacturingvibration cancellation

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