Piezo Nanopositioning Stages

Aerotech Inc.Request Info
Facebook X LinkedIn Email
PITTSBURGH, June 9, 2016 — Piezo Nanopositioning StagesAerotech Inc. has announced the QNPHD linear piezo nanopositioning stages in a compact, high-stiffness package.

With a direct-metrology, capacitive sensor feedback option, high resonant frequencies, and high load capacity, the QNP is ideal for a wide range of high-speed and high-precision applications such as scanning probe microscopy, disc-drive testing and semiconductor wafer articulation. Optional closed-loop feedback using a unique capacitive sensor design allows for subnanometer resolution and single-digit nanometer linearity errors. The capacitive sensors measure the output of the positioning carriage, directly enabling superior accuracy and repeatability.

A direct-drive actuation design and optimized structure enable millisecond response and move-and-settle times. Optimized precision flexures ensure high-stiffness, long device life and high-dynamics while maintaining geometric performance for critical nanopositioning applications.

Published: June 2016
* First Name:
* Last Name:
* Email Address:
* Company:
* Country:

When you click "Send Request", we will record and send your personal contact information to Aerotech Inc. by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our Privacy Policy and Terms and Conditions of Use.

Register or login to auto-populate this form:
Login Register
* Required

nanoProductspiezo nanopositioning stagesAerotechQNPAmericaspositioningmetrologyTest & MeasurementLasersMicroscopysemiconductorsSensors & DetectorsPittsburghPennsylvania

We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.