Piezo Positioning Stages

Aerotech Inc.Request Info
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Piezo Positioning StagesThe QNP2 series of XY, parallel-kinematic, piezo positioning stages from Aerotech Inc. combine subnanometer resolution, high dynamics and high geometric performance in a compact, low-profile package.

The QNP2-100-XYA has a 50 x 50-mm clear aperture with closed-loop travels up to 100 x 100 µm. They employ a parallel-kinematic flexure and metrology design that ensures multi-axis accuracy. Closed- or open-loop feedbacks are available. The capacitive sensor parallel-metrology design directly measures the output of the positioning carriage, enabling 0.15-nm resolution, 0.01 percent linearity and 1-nm bidirectional repeatability.

The design is ideal for optical microscopy, scanning probe microscopy, x-ray transmission microscopy and other applications where two-sided part access is required.

Published: October 2016
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