Piezo Scanner

PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsRequest Info
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Piezo ScannerBased on a parallel-kinematic design, the P-616 NanoCube XYZ piezo scanner from Physik Instrumente LP is a redesign of the P-611 3D positioning stage.

The device features one lightweight moving platform for all three axes, high precision and dynamics in a compact package. It is the company’s smallest and lightest system with capacitive feedback delivering 100-µm travel range. The XYZ stage is driven by ceramic-encapsulated, preloaded PICMA piezo actuators that provide better performance and reliability than conventionally insulated piezo actuators.

Applications include photonics alignment, microscopy, 3D imaging, screening, surface analysis and wafer inspection.

Published: October 2016
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ProductsP-616NanoCubeXYZpiezo scannerAmericas

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