Piezocube
PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsRequest Info
PI (Physik Instrumente) GmbH & Co. KG has introduced a piezocube
for 3-D structuring applications. The NanoCube P-611 X-Y-Z nanopositioning system’s
travel ranges are up to 100 x 100 x 100 μm. It is driven by piezo actuators
and achieves resolutions of up to 0.2 nm at millisecond response times and with
nanometer repeatability. Vacuum-compatible, it operates over a wide temperature
range. Applications include semiconductor manufacturing, optical metrology, micromachining,
photonics and manufacturing of minute polymer and protein structures. The cube sides
measure 44 mm, facilitating integration.
https://www.pi-usa.us/en
/Buyers_Guide/PI_Physik_Instrumente_LP_Motion_Control_Air/c11819
Published: June 2010
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