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Piezoelectric Actuators

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The PU 100 CAP piezoelectric actuator series from piezosystem jena enables new positions and position readjustments to be implemented within a few milliseconds. The piezo-driven positioning solution is suitable for probe alignment in the semiconductor, optics and laser technology industries.

Features include real-time adjustment, travel range up to 80 μm and, in the high-load version, the capability to move a load of 50 lb. Three of the systems, mounted on a circle 120° to each other, are suitable for wafer chuck movement.

The piezoelectric actuators that are completely free from wear and, thanks to the solid flexure guidance system, also completely free of mechanical play. The technology can be integrated into vacuum and cleanroom technology.

Jun 2013
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cleanroom technologyEuropeGermanyopticspiezoelectric actuatorspiezosystem jenaprobe alignmentProduct PreviewProductsPU 100 CAPsemiconductorsTest & Measurementvacuum technologyWaferslasers

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