Planar Air-Bearing Stage
Aerotech Inc.Request Info
The PlanarHDX planar air-bearing stage with FEA-optimized silicon carbide structure and air-bearing compensation techniques enables 1.5-m/s scan speeds and 5-g peak acceleration with a payload of 20 kg. Air-on-air preloading improves turnaround and settling times. A proprietary reaction-mass design reduces stage-induced forces in the step-axis to improve move-and-settle time and increase process throughput.
http://www.aerotech.com/product-catalog/stages/linear-x-y-stages/planarhdx.aspx?utm_campaign=photonics&utm_medium=online&utm_source=am1014b&utm_content=2015-03
https://www.photonics.com/Buyers_Guide/Aerotech_Inc/c383
Photonics Showcase
Mar 2015