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Planar Air-Bearing Stage

Aerotech Inc.Request Info
 
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Planar Air-Bearing StageThe PlanarHDX planar air-bearing stage with FEA-optimized silicon carbide structure and air-bearing compensation techniques enables 1.5-m/s scan speeds and 5-g peak acceleration with a payload of 20 kg. Air-on-air preloading improves turnaround and settling times. A proprietary reaction-mass design reduces stage-induced forces in the step-axis to improve move-and-settle time and increase process throughput.



Published: March 2015
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