Plasma and Ion Beam Processing Software
Oxford Instruments Plasma Technology Ltd.Request Info
Oxford Instruments’ PTIQ range of control software is designed for plasma and ion beam processing systems.
PTIQ is SEMI E95 compliant to facilitate rapid, error-free process setup, providing automated daily, weekly, and monthly checks to optimize up-time for high-volume manufacturing. It also enhances yield through fingerprinting and chamber matching with a flexible batch scheduler to increase throughput. A graphical user interface makes understanding and controlling systems easy with instant access to tolerance, pre-sets, and configuration.
Customizable and error free for multi-user operation, it can be used in any cleanroom environment.
https://plasma.oxinst.com
/Buyers_Guide/Oxford_Instruments_Plasma_Technology_Ltd/c11312
Published: August 2020
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