Plasma and Ion Beam Processing Software

Oxford Instruments Plasma Technology Ltd.Request Info
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ABINGDON, England, Aug. 17, 2020 — Plasma and Ion Beam Processing SoftwareOxford Instruments’ PTIQ range of control software is designed for plasma and ion beam processing systems.

PTIQ is SEMI E95 compliant to facilitate rapid, error-free process setup, providing automated daily, weekly, and monthly checks to optimize up-time for high-volume manufacturing. It also enhances yield through fingerprinting and chamber matching with a flexible batch scheduler to increase throughput. A graphical user interface makes understanding and controlling systems easy with instant access to tolerance, pre-sets, and configuration.

Customizable and error free for multi-user operation, it can be used in any cleanroom environment.

Published: August 2020
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Productsplasma processingIon Beam Processingcontrol softwareLasersOxford InstrumentsindustrialmanufacturingEurope

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