Positioning Platform

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WESTBOROUGH, Mass., April 14, 2011 — The Airglide LED wafer system from Dover is now available in a wide-base version for additional stiffness and support for payloads up to 50 kg, over a travel range of up to 1 m.

Combining industry-leading straightness, accuracy and velocity stability while scanning, the Airglide system is a maintenance-free positioning system for stepping or scanning applications. It is particularly well suited for laser processing of LED or semiconductor wafers, according to the company. Other applications include metrology or precision imaging systems that require high-accuracy step-positioning moves.

The Airglide can be set up as an individual precision axis or stacked as an X-Y assembly, delivering straightness to ±0.5 μm, compensated accuracy to <1 μm, and bidirectional repeatability to ±0.4 μm. Depending upon the payload, it can accelerate at 5 m/s2, provide maximum velocity of 1000 mm/s, and deliver a continuous force of 76 N and a peak force of 240 N over travel ranges from 100 mm to 1 m. The system can be operated with industry-standard servo drive control hardware, or it can be packaged with a Dover controller to deliver fully optimized positioning performance.

Available options include complete-motion rotary and z-theta products, granite base, and granite bridge, which can be integrated with the Airglide XY. When it is configured in a vertical orientation for use as a Z-axis, a pneumatic counterbalance system can be provided. Customized pneumatic tubing and signal cabling are available for customer-enabling technology or additional axes.

Published: April 2011
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Airglide LED wafer systemAmericasDoverlaser processingLED manufacturingmetrologyPositioning systemsProductsscanningsemiconductor waferssteppingTest & Measurementwafer fabrication

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