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Positioning Stages

Aerotech Inc.Request Info
 
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The MPS50SL miniature linear positioning stages manufactured by Aerotech Inc. meet the needs of space-constrained laboratories and production floors. The devices are 50 mm wide, with travels of 25 or 50 mm. They offer resolution of 0.1 µm, repeatability of ±0.75 µm and accuracy of ±1.5 µm. They feature a precision ground ball-screw or leadscrew drive, a DC servo- or stepper motor, crossed-roller bearings, high-vacuum capability and multiaxis configurations. The stages are suitable for measurement, testing, alignment and component assembly. The DC servomotor is equipped with a rotary encoder, and the crossed-roller linear bearings provide smooth travel and payload capabilities up to 5 kg, with a stage mass of 0.85 kg. The stages are used in semiconductor manufacturing and inspection, optics fabrication and military/aerospace applications.

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Photonics Spectra
Dec 2011
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