Pulseo 355-nm Industrial Laser

MKS/Spectra-Physics

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SANTA CLARA, Calif., Jan. 21, 2010 – Spectra-Physics, a Newport Corp. Brand, has announced an addition to its Pulseo family of Q-switched diode-pumped solid-state industrial lasers. The rugged and reliable Pulseo 355-10 provides 10 W of 355-nm output at 90 kHz with a short pulse width of <23 ns.

Applications include crystalline silicon photovoltaic solar cell manufacturing processes such as wafer scribing and dicing, drilling and marking. The high-power industrial laser is also suitable for use in microelectronics applications, such as via hole drilling, flex circuit cutting, flat panel manufacturing, indium tin oxide patterning, LED substrate scribing, silicon wafer dicing/scribing and low-K dielectric scribing.

The laser delivers high peak power and high repetition rates which, combined with the short pulse width, reduce undesired thermal effects and result in higher throughput with less damage to the parts.

Features include the Active Laser Purification System for longer life, good beam quality and stability, a compact design and field-replaceable key components such as diodes, fiber and output window. Peak power is ~5 kW, average power is >10W, nominal repetition rate is from 0 to 300 kHz, and beam divergence is <0.3 mrad. The laser produces a TEM00 beam with M2 of <1.3.

Polarization is vertical with a >100:1 ratio. Asymmetry is >85%, beam diameter, at waist, is 2 mm ±10%, and astigmatism is <0.2. Pulse-to-pulse stability is <4% rms, and power stability over 8 h at constant temperature is ±2%, peak-to-peak. The water-cooled laser operates over a temperature range from 18 to 35 °C, with warm-up time from cold start of <1 hr and, from standby, <30 min. It offers high uptime, low cost of ownership and good near- and far-field pointing stability.

Power consumption is 1.1 kW, and fiber length is 5 m.

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Published: January 2010