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RESOLUTE UHV True-Absolute Optical Encoder

Renishaw Inc.Request Info
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HOFFMAN ESTATES, Ill., July 16, 2012 — RESOLUTE UHV is an ultrahigh-vacuum-compatible read head from Renishaw Inc. offering true-absolute position feedback, submicron accuracy and resolutions to 1 nm for linear and rotary applications.

Constructed from clean vacuum-compatible materials and adhesives to produce low outgassing rates and clean residual gas analysis, it is suitable for semiconductor and scientific applications requiring vacuum compatibility to 10−10 Torr.

The instrument determines position immediately upon switch-on, without the need for any movement or battery backup. Instant commutation means axes are immediately under control after power loss. This eliminates risks of unchecked movements or collisions, an advantage in applications such as wafer handling, where safe extraction of high-value wafers is critical.

Safety is assured via an independent position-checking algorithm that confirms every reading, ensuring that potential problems are flagged before they reach the controller. The device uses pure serial communications with cyclic redundancy check, which eliminates the need for auxiliary 1-Vpp signals, offers higher noise immunity and detects data corruption. Available with a variety of serial protocols, including BiSS, FANUC, Mitsubishi and Panasonic, it is compatible with industry-standard controllers.

The encoder is supplied with a UHV-compatible cable that is screened for radio-frequency interference. Because it uses a single-track scale code, each installation is compact with wide setup tolerances for long-term operation. All scale formats are coating-free and can be subjected to specialist cleaning and degreasing, if required.

Designers can choose from a variety of linear scales in stainless steel or ZeroMet low-thermal-expansion alloy, with accuracy to better than ±1 µm on lengths up to 1.13 m. Mounting can be self-adhesive, mechanical or track-mounted. Stainless steel rotary rings feature large through-holes and patented taper mounting for quick and precise adjustment of eccentricity, while minimizing shaft preparation costs.

The device is RoHS-compliant.
Jul 2012

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AmericasBiSSCommunicationscyclic redundancy checkFANUCIllinoislinear applicationsMitsubishi serial protocolPanasonic serial protocolposition-checking algorithmProductsread headRenishawRESOLUTE UHVrotary applicationsscientific applicationssemiconductor applicationsTest & Measurementtrue-absolute position feedbackwafer handling

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