RGA150 Motorized Rotation Stage
MKS/NewportRequest Info
The RGA150 low-profile and large aperture rotary stage addresses the need for quick angle adjustments of wafers and vacuum chucks. Although specifically tailored to semiconductor applications, the RGA150 can also be utilized in other industrial applications, such as through hole imaging/inspection or laser processing, automation, or any general positioning application that requires fast positioning.
https://www.newport.com/p/RGA150
https://www.photonics.com/Buyers_Guide/MKS_Newport/c10218