RGA150 Rotation Stage
MKS/NewportRequest Info
The RGA150 low-profile and
large-aperture rotary stage
addresses the need for quick
angle adjustments of wafers
and vacuum chucks. Although
specifically tailored to semiconductor
applications, the
RGA150 can also be utilized in
other industrial applications,
such as through hole imaging/
inspection or laser processing,
automation, or any general positioning application that requires fast
positioning.
https://www.newport.com
/Buyers_Guide/MKS_Newport/c10218
Published: August 2022
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