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RGV100HL Rotation Stage

MKS/NewportRequest Info
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IRVINE, Calif., Dec. 21, 2012 — Newport Corp. has introduced the compact and high-torque RGV100HL, a high-speed precision rotation stage. Developed to accelerate loads having high rotational inertia, the stage is compatible with the company’s XPS-DRV02 driver.

The stage provides the same high resolution and positioning performance as the legacy RGV100BL, while delivering three times the torque and five times the acceleration.

Direct-drive technology provides faster rotating speeds with reliability and enhanced positioning sensitivity. By integrating the bearings with the motor, the stage’s footprint is only 115 × 115 mm. A precision glass scale encoder guarantees 0.0003° repeatability and 0.0001° minimum incremental motion.

The brushless DC torque motor with rare earth magnets optimizes the available torque to deliver rapid point-to-point motions. Other features include 360° travel with 0.01° on-axis accuracy, a proprietary four-point contact ball-bearing design, and a 30-mm diameter through-hole for easy routing of cable and vacuum lines.

The stage is for demanding applications requiring fast dynamic response and for tasks that require moving larger platens. It is suited for semiconductor wafer inspection and metrology, laser micromachining, microrobotics, motion simulators, rate tables and simulators, sensor calibration and MEMs production.
Dec 2012

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Americasball bearingbrushless DC torque motorCaliforniadirect-driveglass scale encoderhigh rotational inertialaser micromachiningMEMSmetrologymicroroboticsmotion simulatorsNewportProductsrare earth magnetsrate tablesRGV100BLRGV100HLrotation stagesemiconductor wafer inspectionsemiconductor wafer metrologysensor calibrationSensors & DetectorssimulatorsTest & MeasurementXPS-DRV02 driver

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