Request InfoTeledyne Princeton InstrumentsPrinceton Instruments/Acton has unveiled the ExciLife-193 optical coatings for OEM applications. At a 45° incidence angle, the coatings provide >97% reflectance at 193 nm. The design was tested with an argon-fluoride 193-nm excimer laser at 300 mJ/cm2, 100 and 200 Hz, for 2 million laser pulses, without damage or change in reflectivity. To simulate immersion lithography applications, the coatings were placed in deionized water for one week and laser-tested at >500 mJ/cm2, 100 Hz, for 100,000 pulses, without damage. 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