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PI Physik Instrumente - Space Qualified Steering LW 1-15 MR

AVS 2.0 Monitoring Software

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CyberOptics Corp.
BEAVERTON, Ore., Dec. 30, 2010 — CyberOptics Semiconductor Inc. has demonstrated the newest application of its wafer vibration monitoring software as well as a new airborne particle sensor for wafer processing equipment. With vibration tied to semiconductor process equipment failure, and low yields and cycle times, the AVS 2.0 vibration monitoring software provides engineers the data they need to improve processes. Working in unison with the company’s auto vibration system, the AVS 2.0 enables fab engineers to identify vibration anomalies during wafer processing by filtering out acceptable vibration...See full product

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